Beilstein J. Nanotechnol.2019,10, 1523–1536, doi:10.3762/bjnano.10.150
proposes a new approach of hybridmetrology taking advantage of the complementary nature of atomic force microscopy (AFM) and scanning electron microscopy (SEM) techniques for measuring the main characteristic parameters of nanoparticle (NP) dimensions in 3D. The NP area equivalent, the minimal and the
equality between their height and their lateral diameters. However, discrepancies between AFM and SEM measurements have been observed, showing significant deviation from sphericity as a function of the nanoparticle size.
Keywords: AFM; hybridmetrology; nanoparticles; SEM; size distribution; uncertainty
-emission guns can reach a resolution of 1 nm in the XY-plane.
Consequently, we propose in this paper the development of a hybridmetrology that allows for the measurement of the characteristic dimensions of a nano-object in 3D, by combining the measurements performed with AFM and SEM. The concept of hybrid
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Figure 1:
Basic principle for measuring the NP height by AFM and NP lateral diameters by SEM.
Beilstein J. Nanotechnol.2018,9, 1623–1628, doi:10.3762/bjnano.9.154
hybridmetrology approach combining SPM with SIMS, this is a technique able to observe the actual Li concentration.
Using the C-AFM tip as a nanoscaled electrode, we can now stress films at different bias values by scanning over the surface (8.5 min) and subsequently observe the induced conductivity
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Figure 1:
C-AFM configuration and study of the influence of an applied voltage stress on MnO2 and LMO. (a) Sc...